设备尺寸 | 1080 / 1500 / 2000 x 380 x 480 ULM 300-E: 685 x 280 x 480 | 1080 / 1500 / 2000 x 380 x 480 ULM 300-E: 685 x 280 x 480 | 1080 / 1500 / 2000 x 380 x 480 ULM 300-E: 685 x 280 x 480 | 1080 / 1500 / 2000 x 380 x 480 ULM 300-E: 685 x 280 x 480 |
测量不确定性 MPEE1 (L in mm) [µm] | ≤ (0.09+L/2000) | ≤ (0.09+L/2000) or ≤ (0.3+L/1500) | ≤ (0.09+L/2000) or ≤ (0.3+L/1500) | ≤ (0.09+L/2000) or ≤ (0.3+L/1500) |