基本规格:
SU8 1040(厚高深宽比负光阻0.8 to 10μm)
SU81060(厚高深宽比负光阻6.0 to 50μm)
SU81070(厚高深宽比负光阻15 to 200μm)
SU81075(厚高深宽比负光阻>100μm)
SU8 Developer(显影液)
SU8 Stripper(去光阻液)
D-35(Metal Ion无机浓缩显影液)
DS-10(PC-60i &20i去光阻液& NPR-10D显影液)
VLSI-237(Metal Ion Free有机显影液)
NPR-20(Negative Photoresist负光阻)
NPR-2500F(Negative Photoresist耐酸负光阻)
NPR-7000F(Negative Photoresist耐酸负光阻)
PR-10(Positive Photoresist正光阻)
PC-20i(Protective Coating树脂保护胶)
S-100(正负两用光阻剥膜液& PC-20i有机剥膜液)
S-6000(Positive & Negative Photoresist正负光阻)