当前位置：安捷来国际股份（香港）有限公司>>日本大和科学株式会社Yamato Scientific Co.,Ltd>>YAMATO等离子清洗机>>日本YAMATO等离子清洗机PR500/510

日本YAMATO等离子清洗机PR500/510

返回列表页

参考价

面议

具体成交价以合同协议为准

产品型号PR500/PR510

品牌

厂商性质其他

所在地

在线询价收藏产品查看联系电话

包装印刷网采购部电话：0571-88918531QQ:2568841715

联系方式：查看联系方式

更新时间：2023-08-20 07:54:36浏览次数：346次

联系我时，请告知来自包装印刷网

产品分类 品牌分类

  日本大和科学株式会社Yamato Scientific Co.,Ltd

YAMATO等离子清洗机

YAMATO干燥箱

YAMATO玻璃器皿清洗机

全部产品列表

暂无信息

安捷来国际股份（香港）有限公司

经营模式：其他

商铺产品：22条

所在地区：

询价 给他留言

产品简介

详细介绍

日本YAMATO等离子清洗机PR500/510：

Gas Plasma Etcher

PR500/PR510

Model
500	510
Method
Barrel type of DP DP : direct plasma
High-frequency Output
Max.500W
Oscillating Frequency
13.56MHz
Reaction Chamber
ø215×305mm

The PR500/510 isagasplasma device that is used widely for such applicationsasproductionof semiconductors and analysis work. Itboastsoutstandingoperability and safety, with an automatic tuningsystemas a standardcomponent and other features.

It has a compact design,withasmall-size HF generator and an oscillation sectionintegratedwitha portion of the chamber.
With the 215mm diameterlargecaliberchamber, the unit can process bigtestingsamples.

The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.

Reaction Chamber	Control Panel
Withthe215mm diameter large caliberchamber	FORWARD/REFLECT indicatebydigital

Operation Flowchart

Piping System Diagram

Specifications

Model	PR500	PR510
Method	Barrel type of direct plasma
Controlpart
Highfrequency output	Max.500W
Oscillating frequency	13.56MHz
Outputimpedance	50Ω
Tuningmethod	Automatic tuning
Instrument	Output watt meter (0 to 600W) Reflected wave watt meter (0 to 300W) Vacuum gauge, thermocouple type Flow meter, needle valve integrated type, 2 sets
Timer	0.1sec. to 999h
Gasinlet	1/4"stainless steel, 2 inlet
Powersource (50/60Hz)	AC100/220V, single phase, 2 kVA
Reactionpart
Reactionchamber	Madeof quarts, φ215×305mm
Electrodestructure	Condenser type, 4-way split
Controlsystem	Autopressurereduction, auto leak valve	TouchpanelwithPLC control
Pipingmaterial	SUS,Teflon
Externaldimensions(W×D×Hmm)	438×520×760	520×630×760
Weight	Approx.38kg	Approx.60kg
StandardAccessories
	Connection cable :1completeset Vacuum grease : 1 pc. O-ring for reaction chamber:1pc.
OptionalAccessories
Frame for wafers, 2, 3,4,5, 6 inches Multipurposeangledframe Aluminum etchingtunnelStand