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日本YAMATO等离子清洗机PR1000

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产品型号PR1000

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详细介绍

日本YAMATO等离子清洗机PR1000:

Plasma Cleaner

PR1000

Plasma Mode

DP:DirectPlasma

Radio-FrequencyOutput

10to1000W

Oscillating Frequency

13.56MHz

ChamberSize(mm)

ø300X500D

Barreledtypelargeglass chamber

EquipmentSummary
ThisPlasma cleaner is made up composed ofasfollows;

Reaction chamber
Matching box fortakingadjustbetween
load and RF power
Reaction gasflowsystem(CF4 and O2)
PLC controllerwithTouchpanel
Radio-frequencypowersupply(RF)
Vacuum pump
Purge gas system (N2)

Specifications

Model	PR-1000
MainUnit
Chambersize	ø300×500(D)mm
Chambermethod	Quartzglass
Electrode	Condenser(4division)
Plasmamode	DP mode
Vacuumgauge	Capacitancemanometer T
Reactiongas system	wosystem(CF4, O2)
Maincontroller	PLCcontroller
Display	LCDcolordisplayａnd Touch panel (5.7 inch)
Door	Manualopen,swingtype
ExternalDimension	700(W)×820(D)×1600(H)mm
Radio-FrequencyPower Supply
Inputvoltage	AC200V8A50/60Hz
Radio-frequency output power	10 to1000W
Referenceoscillator	Quartzoscillator
Oscillating frequency	13.56MHz
Outputsetting system	Digitalsetting
Matchingadjustment	Automatictuning
VacuumPump
Displacement	670L/min.
Inputpower supply	3 phaseAC200V11A50/60Hz
InletConfiguration	NW40
OutletConfiguration	NW40
GasSystem
Purgegas	N2
Reactiongas control	Massflowcontroller CF4 (F.S.300sccm) O2 (F.S.300sccm)
System Protectionof Equipment
Protect over current,Builtinprotect over current of Vacuum pump, RF power supplyandmainunit Protect quartzoscillator,Whenmatching unit have miss matching, Automatic RF powerdownandprotect quartz oscillator Door panel inter lock, Builtininterlock switch External coversafetylockswitch Emergency stop switch
SystemProtections by Software in PLC
When occurredfollowingconditions,Equipment stop and Error will display. In case of RF power is outofsettingvalue. In case of gas flow (CF4, O2) is out of setting flow rate. In case of RFW powerisoverpermission value. In case of Vacuum pressuredoesnotreach within setting time. After finish plasmaprocess,chamberdoes not become atmosphere.
Utility
Electricpower supply	3 phaseAC380V20A50/60Hz (Total system) with down transformer
CF4 gas	0.15to0.25Mpa
O2 gas	0.15to0.25Mpa
PressureAir	0.4 to0.6Mpafordriving air valve
Connectingsize	1/4swagelok