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日本YAMATO大气等离子清洗机YAP510S

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产品型号YAP510S

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日本YAMATO大气等离子清洗机YAP510S ：

Atmospheric Plasma Cleaner

YAP510S(On Patent Applying)

Outline

Atmospheric Plasma Cleaner canbeapplied to wide range of usage such as electronic materialbyutilizing high-activation of high-energy electron and radicalionin plasma reaction.

This equipment has a lotofadvantages;

Vacuum Process isnotrequired
Simple Utility Preparation(Reactiongas and power supply only)
Setting space also is saved(becauseof no vacuum system)
Vacuum tank is not required sothatthe wider space is available for various purposes.

Features

The sample can bedirectlyplasma-processed just by putting it on the stage.
Low Temp. Plasma isavailablebecause of the atmospheric glow-discharging plasma
Easily applied to In-linesystembecause of no vacuum system.

Application

Surface treatment for highpolymermaterials
Glass panel cleaning for FPD
Ashing treatment
Surface activation(OxidationorDeoxidization)

Specification

Standard Sample Size	300 x300mm (Can be customized)
Power Supply	HighFrequency Power Supply (Low Frequency also available)
Power Output	500W
Gas	3 lines(Selectable from Ar, He, O2 and N2)
Gas Flow Rate	1 to10L/min.
Utility	PowerSupply AC200V, 3-phase, 15A
Exhaust Duct	10f
Standard Equipment Dimensions	730W x750D x 1,700Hmm
Control	PLC, TouchPanel