- 产品详细介绍
- 详细参数
| ITEM | SPECIFICATION | |
| Light source and exposure method | Short-arc mercury xenon Lamp,single lamp,double-side exposal | 短弧汞氙灯，单灯，上面曝光 |
| Light | Collimated light | 平行光源 |
| Interface | Chinese/English+color touch screen | 中文+彩色触控屏幕 |
| Panel size | 400*500mm | 产品尺寸400*500mm(可根据客户要求定制) |
| Resist | Dry film | 感光剂形态：干膜 |
| Energy | 30mw/c㎡ | 曝光面未经过玻璃初始照度 |
| Uniformity | >90% | 照度分布均匀性 |
| Cleanroom | Class 1,000 | 无尘室等级要求 |
| Collimation | θc/2<2º | 平行半角 |
| Declination | θd<1.5º | 倾斜角 |
| Wavelength | 365nm | 灯管波长 |
| Exposure tray | Glass vs Metal | 玻璃/铝合金金属平台 |
| Frame vacuum | Adjustable between 0~-500mm Hg | 玻璃间真空强度设定可调整范围 |
| Vacuum control | Time delay settable | 真空控制方式具备时间延迟设定功能 |
| System | PLC | PLC可程式控制器 |
| Exposal control | Automatic testing of light strength,automatic product control of light energy | 自动感测光强，自动计量控制光能源 |
| Specification | Error message with Error code | 异常显示及讯息代码显示 |
| Length*Width*Height | 2760*1120*2000mm | 机器长度/机器宽度/机器高度 |
| Electrical | 380V 50Hz 3ɔ 12KVA | 电源需求 |
| Air source | 5kg/c㎡,￠12mm | 空压需求 |
| Cooling | 7-12℃,20L/min,1" pipe | 冰水需求 |
| 机器制作材料：外壳SUS430不锈钢 | ||
